Technologies of Sensors

Learning goals

Students get familiar with sensor principles and the manufacturing processes used in industry. There is a special focus on the trend of miniaturization using techniques adopted from microelectronics. Techniques are discussed in detail, so students get an idea of the modern sensor production industry.

Course contents

The following topics will be covered in the course:

  • Introduction to Sensors
  • Manufacturing Processes
  • Micro fabricated Sensors
  • Photolithography
  • Thin Film Deposition
  • Etching / Deep Etching
  • Real examples of most common microsensors
  • Packaging and Integration
  • Characterization Techniques



Dr. Eric Fribourg Blanc


2 Credit Points

Certification of credits:

Written examination over 2 hours